Fabrication of sub-micron Thick, low loss As2S3 planar waveguides

Author

Choi, Duk-Yong ; Madden, Steve ; Bulla, Douglas ; Wang, Rongping ; Rode, Andrei ; Luther-Davies, Barry

Author_Institution

Centre for Ultrahigh-bandwidth Devices for Opt. Syst., Australian Nat. Univ., Canberra, ACT, Australia

fYear

2009

fDate

14-19 June 2009

Firstpage

1

Lastpage

1

Abstract

This work demonstrates the fabrication of sub-micron thick, compact waveguides that posses low propagation loss. As₂S₃ film, a chalcogenide glass-based material is utilized for a more compact photonic integrated circuit waveguide device. Therefore, these sub-micron thick, low loss waveguides show a promising platform for parametric amplifiers and supercontinuum generation.

Keywords

arsenic compounds; chalcogenide glasses; optical fabrication; optical losses; optical parametric amplifiers; optical planar waveguides; semiconductor thin films; supercontinuum generation; As₂S₃; As₂S₃ film; As₂S₃ planar waveguides; chalcogenide glass; compact waveguides; low loss waveguides; low propagation loss; optical fabrication; parametric amplifiers; photonic integrated circuit device; submicron thick waveguides; supercontinuum generation; Fabrication; Nonlinear optics; Optical devices; Optical films; Optical losses; Optical scattering; Optical waveguides; Optimized production technology; Propagation losses; Protection;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics 2009 and the European Quantum Electronics Conference. CLEO Europe - EQEC 2009. European Conference on

Conference_Location

Munich

Print_ISBN

978-1-4244-4079-5

Electronic_ISBN

978-1-4244-4080-1

Type

conf

DOI

10.1109/CLEOE-EQEC.2009.5196491

Filename

5196491