Title :
Transfer of InGaP/GaAs double-junction micro-cuboid array onto foreign substrates using epitaxial lift-off (ELO) technique
Author :
Chao, Jiun-Jie ; Shiu, Shu-Chia ; Lin, Ching-Fuh
Author_Institution :
Grad. Inst. of Photonics & Optoelectron., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
As a result of the ability to tune the band-gap of III-V compound semiconductor materials to match the solar spectrum, solar cells made from II -V materials such as GaAs and InGaP have unsurpassed conversion efficiencies. However, after the deposition of the solar cell film, the substrate is of no further use for its performance. The reduction of the costs of III-V semiconductor materials and the increase of the power to weight ratio are highly desired. The most successful method to achieve these goals is epitaxial lift-off (ELO). In order to shorten the ELO etching time and prevent the microscopic cleavage cracks, the authors develop a unique transplantation method. The steps in this technique were presented in this paper.
Keywords :
III-V semiconductors; epitaxial growth; gallium arsenide; indium compounds; semiconductor epitaxial layers; solar cells; sputter etching; InGaP-GaAs; compound semiconductor material; double junction microcuboid array; epitaxial lift-off technique; etching time; microscopic cleavage crack; solar cell film deposition; solar spectrum; transplantation method; Costs; Etching; Gallium arsenide; III-V semiconductor materials; Microscopy; Photonic band gap; Photovoltaic cells; Semiconductor films; Semiconductor materials; Substrates;
Conference_Titel :
Lasers and Electro-Optics 2009 and the European Quantum Electronics Conference. CLEO Europe - EQEC 2009. European Conference on
Conference_Location :
Munich
Print_ISBN :
978-1-4244-4079-5
Electronic_ISBN :
978-1-4244-4080-1
DOI :
10.1109/CLEOE-EQEC.2009.5196497