Title :
Process diagnosis via electrical-wafer-sorting maps classification
Author :
Di Palma, Federico ; De Nicolao, Giuseppe ; Miraglia, Guido ; Donzelli, Oliver M.
Author_Institution :
Dipt. di Informatica e Sistemistica, Pavia Univ., Italy
Abstract :
The commonality analysis is a proven tool for fault detection in semiconductor manufacturing. This methodology extracts subsets of production lots from all the available data. Then, data mining techniques are used only on the selected data. This approach loses part of the available information and does not discriminate among the lots. The new methodology performance the automatic classification of the electrical wafer test maps in order to identify the classes of failure present in the production lots. Subsequently, the proposed procedure uses the process history of each wafer to create a list of the root cause candidates. This methodology is the core of the software tool ACID which is currently used for process diagnosis at the Agrate site of the ST Microelectronics. A real analysis is presented.
Keywords :
data mining; fault diagnosis; pattern classification; process planning; semiconductor device manufacture; automatic classification; commonality analysis; data mining; electrical wafer test map; electrical-wafer-sorting maps classification; fault detection; process diagnosis; semiconductor manufacturing; Automatic testing; Data mining; Fault detection; History; Information analysis; Microelectronics; Production; Research and development; Semiconductor device manufacture; Software tools;
Conference_Titel :
Data Mining, Fifth IEEE International Conference on
Print_ISBN :
0-7695-2278-5
DOI :
10.1109/ICDM.2005.123