Title :
A miniature integrated circuit accelerometer
Author :
Roylance, L. ; Angell, J.
Author_Institution :
Hewlett-Packard Laboratories, Palo Alto, CA, USA
Abstract :
Batch fabrication of an extremely small accelerometer, 3mm long and weighing 0.02gm, has been achieved using silicon IC technology. Accelerations from 0.001g to 50g can be measured over a 100Hz bandwidth.
Keywords :
Acceleration; Accelerometers; Bandwidth; Etching; Fabrication; Glass; Particle beams; Resistors; Silicon; Stress;
Conference_Titel :
Solid-State Circuits Conference. Digest of Technical Papers. 1978 IEEE International
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/ISSCC.1978.1155836
