Title :
2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 2000 (Cat. No.00CH37072)
Abstract :
The following topics were dealt with: process specific yield learning; factory dynamics; yield analysis and modelling; defect source methodology; workforce education and training; cost and profitability; advanced processes; defect reduction for yield enhancement; process control; equipment productivity
Keywords :
integrated circuit economics; integrated circuit yield; semiconductor technology; advanced processes; advanced semiconductor manufacturing; cost; defect reduction; defect source methodology; equipment productivity; factory dynamics; process control; process specific yield learning; profitability; training; workforce education; yield analysis; yield enhancement; yield modelling;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 2000 IEEE/SEMI
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-5921-6
DOI :
10.1109/ASMC.2000.902549
