Design Research of a Novel High Speed Nanometer Positioning System on Macro/Micro Driven for MEMS

With the increasing demand of high speed and precision positioning system for the devices packaging in microelectromechanical system (MEMS), a novel high speed nanometer positioning XY stage system on macro/micro driven is presented in this paper. The stage integrates the advantage of macro stage driven by linear voice coil motor (VCM) such as long stroke and high speed, and the advantage of micro stage driven by piezoelectric actuator (PZT) such as high response and nanometer resolution. Adopting a novel elastic decoupling mechanism used to avoid the moving gap, the stage haves the entire decoupling characteristic in kinematics and control. Based on the analysis and optimization of the mechanism in high dynamic state, the XY stage prototype is manufactured. And based on the model of control system, the macro-micro control strategy with high speed and high accuracy is investigated. The simulation results verify that the system dynamic performance is significantly increased and the steady-state error is reduced to plusmn10 nm