DocumentCode
2866350
Title
Characterization of a 90° waveguide bend using near-field scanning optical microscopy
Author
Yuan, Guangwei ; Stephens, Matthew D. ; Dandy, David S. ; Lear, Kevin L.
Author_Institution
Electr. & Comput. Eng. Dept., Colorado State Univ., Fort Collins, CO
fYear
2006
fDate
21-26 May 2006
Firstpage
1
Lastpage
2
Abstract
Multiple modes are directly imaged in a silicon nitride waveguide bend using near-field scanning optical microscopy (NSOM). The observations are in good agreement with modal calculations using conformal index transformation.
Keywords
conformal mapping; near-field scanning optical microscopy; optical testing; optical waveguides; silicon compounds; waveguide discontinuities; wide band gap semiconductors; NSOM; SiN; conformal index transformation; modal calculation; near-field scanning optical microscopy; silicon nitride waveguide bend characterization; Attenuation; Biology computing; Biomedical optical imaging; Interference; Optical microscopy; Optical sensors; Optical surface waves; Optical waveguide theory; Optical waveguides; Surface topography; (000.0000) General;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2006 and 2006 Quantum Electronics and Laser Science Conference. CLEO/QELS 2006. Conference on
Conference_Location
Long Beach, CA
Print_ISBN
978-1-55752-813-1
Electronic_ISBN
978-1-55752-813-1
Type
conf
DOI
10.1109/CLEO.2006.4627942
Filename
4627942
Link To Document