• DocumentCode
    2866350
  • Title

    Characterization of a 90° waveguide bend using near-field scanning optical microscopy

  • Author

    Yuan, Guangwei ; Stephens, Matthew D. ; Dandy, David S. ; Lear, Kevin L.

  • Author_Institution
    Electr. & Comput. Eng. Dept., Colorado State Univ., Fort Collins, CO
  • fYear
    2006
  • fDate
    21-26 May 2006
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Multiple modes are directly imaged in a silicon nitride waveguide bend using near-field scanning optical microscopy (NSOM). The observations are in good agreement with modal calculations using conformal index transformation.
  • Keywords
    conformal mapping; near-field scanning optical microscopy; optical testing; optical waveguides; silicon compounds; waveguide discontinuities; wide band gap semiconductors; NSOM; SiN; conformal index transformation; modal calculation; near-field scanning optical microscopy; silicon nitride waveguide bend characterization; Attenuation; Biology computing; Biomedical optical imaging; Interference; Optical microscopy; Optical sensors; Optical surface waves; Optical waveguide theory; Optical waveguides; Surface topography; (000.0000) General;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2006 and 2006 Quantum Electronics and Laser Science Conference. CLEO/QELS 2006. Conference on
  • Conference_Location
    Long Beach, CA
  • Print_ISBN
    978-1-55752-813-1
  • Electronic_ISBN
    978-1-55752-813-1
  • Type

    conf

  • DOI
    10.1109/CLEO.2006.4627942
  • Filename
    4627942