Title :
Integrated signal conditioning for diaphragm pressure sensors
Author :
Borky, J. ; Wise, K.
Author_Institution :
Air Force Institute of Technology, Wright-Patterson AFB, OH, USA
Abstract :
A silicon thin-diaphragm piezoresistive pressure sensor incorporating signal conditioning has been developed. The device exhibits 1% accuracy over a wide pressure range, requiring only two leads and no external components.
Keywords :
Biomedical measurements; Biosensors; Bridge circuits; Mechanical sensors; Resistors; Sensor phenomena and characterization; Silicon; Temperature distribution; Temperature measurement; Temperature sensors;
Conference_Titel :
Solid-State Circuits Conference. Digest of Technical Papers. 1979 IEEE International
Conference_Location :
Philadelphia, PA, USA
DOI :
10.1109/ISSCC.1979.1155903
