Title :
Fabrication of Diffractive Optical Lens for Beam splitting Using LIGA Process
Author :
Yang, Jauh Jung ; Liao, Yun Shiuan ; Chen, Chi Feng
Author_Institution :
Deptment of Mech. Eng., Nat. Taiwan Univ., Taipei
Abstract :
A LIGA process to fabricate the eight-level diffractive optical lens array for beam splitting is presented. The pattern of diffractive optical lens with two focal points is designed with an optimal rotation-angle method and realized through silicon etching, nickel electroplated and hot embossing process. Fabrication errors resulted from complex kinoform structure and micrometer-range feature size are taken care by tetraethoxysilane oxide etching and special designed de-mold techniques so that high quality diffractive optical lens can be fabricated. A PMMA-based diffractive optical lens is measured to confirm the optical properties. Comparing the measurement results and the simulation results, it is found that a PMMA-based diffractive optical lens with excellent optical properties are obtained. The diffraction efficiency error is only 5.19% and the uniformity error is 1.52%
Keywords :
LIGA; diffractive optical elements; electroplating; embossing; etching; lenses; optical beam splitters; optical fabrication; LIGA process; PMMA; beam splitting; demold techniques; eight-level diffractive optical lens array; hot embossing process; nickel electroplated; optimal rotation-angle method; silicon etching; Etching; Lenses; Nickel; Optical arrays; Optical beam splitting; Optical beams; Optical design; Optical device fabrication; Optical diffraction; Silicon; Beam splitting; Diffraction Microlens; Diffraction efficiency; Hot embossing; LIGA fabrication;
Conference_Titel :
Mechatronics and Automation, Proceedings of the 2006 IEEE International Conference on
Conference_Location :
Luoyang, Henan
Print_ISBN :
1-4244-0465-7
Electronic_ISBN :
1-4244-0466-5
DOI :
10.1109/ICMA.2006.257804
