Fully integrated switchable filter banks

Fully integrated switchable filter have been successfully demonstrated using a ra CMOS SOI process in conjunction with an a (AlN) microresonator process. Single pole-mul were developed in the CMOS SOI process th multi-project wafer runs while the filters were aluminum nitride based microresonators. Each concurrent design cycles and was demonstrated to integration. After design improvements to bo full monolithic integration was implem microresonator filters with the CMOS switc compatibility of the two technologies. A four ch switchable bank of ∼7MHz bandwidth filters demonstrated exhibiting approximately 8 dB of 60dB of stop band rejection.