DocumentCode
2868587
Title
A 65mW 128K EB-ROM
Author
Kiuchi, Kentaro ; Ieda, N. ; Takeya, K. ; Baba, Toshihiko
Author_Institution
NTT Musashino Electrical Communication Lab., Tokyo, Japan
Volume
XXII
fYear
1979
fDate
14-16 Feb. 1979
Firstpage
12
Lastpage
13
Abstract
A high density 128K EB-ROM using direct electron-beam data writing and processes to provide 2μm patterns will be presented. The completed ROM has 200ns access time and 65mW power dissipation.
Keywords
Capacitance; Clocks; Decoding; Inverters; Power dissipation; Read only memory; Solid state circuits; Transistors; Voltage; Writing;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference. Digest of Technical Papers. 1979 IEEE International
Conference_Location
Philadelphia, PA, USA
Type
conf
DOI
10.1109/ISSCC.1979.1156009
Filename
1156009
Link To Document