DocumentCode
2868742
Title
An on-chip coupling capacitance measurement technique
Author
Nair, Pratheep A. ; Gupta, Anubhav ; Desai, Madhav P.
Author_Institution
Dept. of Electr. Eng., Indian Inst. of Technol., Bombay, India
fYear
2001
fDate
2001
Firstpage
495
Lastpage
499
Abstract
We describe a technique for the accurate measurement of on-chip coupling capacitance using a Charge Based Coupling Capacitance Measurement (CBCCM) Technique. Detailed circuit simulations show that this method can measure sub-femtofarad coupling capacitance values, and can be used to isolate and measure components of device capacitance as well
Keywords
VLSI; capacitance measurement; circuit simulation; integrated circuit interconnections; integrated circuit measurement; IC interconnects; IC measurement; VLSI; capacitance measurement technique; charge based technique; circuit simulations; device capacitance; on-chip coupling capacitance; sub-femtofarad coupling capacitance; Capacitance measurement; Charge measurement; Coupling circuits; Current measurement; Distributed control; Electric variables measurement; Integrated circuit interconnections; Signal generators; Variable structure systems; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Design, 2001. Fourteenth International Conference on
Conference_Location
Bangalore
ISSN
1063-9667
Print_ISBN
0-7695-0831-6
Type
conf
DOI
10.1109/ICVD.2001.902707
Filename
902707
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