Title :
GaN-based photonic crystals and integrated optics
Author :
Rosenberg, A. ; Carter, Michael W. ; Casey, J.A. ; Kim, Mijin ; Holm, Ronald T. ; Henry, Richard L. ; Mastro, M.A. ; Eddy, Charles R. ; Shamamian, V.A. ; Bussmann, K.
Author_Institution :
Naval Res. Lab., Washington, DC
Abstract :
We have developed growth techniques for GaN-based multilayer films suitable for low-loss optical waveguides, as well as precision patterning for integrated optics and photonic crystal structures with sub-100 nm critical features.
Keywords :
III-V semiconductors; gallium compounds; integrated optics; nanopatterning; nanophotonics; optical fabrication; optical multilayers; optical waveguides; photonic crystals; semiconductor growth; semiconductor thin films; wide band gap semiconductors; GaN; growth technique; integrated optics; low-loss optical waveguides; multilayer films; photonic crystal structures; precision patterning; size 100 nm; Gallium nitride; Integrated optics; Optical devices; Optical films; Optical resonators; Optical sensors; Optical waveguides; Optoelectronic and photonic sensors; Photonic crystals; Slabs; (230.3990) Microstructure devices; (230.5750) Resonators;
Conference_Titel :
Lasers and Electro-Optics, 2006 and 2006 Quantum Electronics and Laser Science Conference. CLEO/QELS 2006. Conference on
Conference_Location :
Long Beach, CA
Print_ISBN :
978-1-55752-813-1
Electronic_ISBN :
978-1-55752-813-1
DOI :
10.1109/CLEO.2006.4628135
