Title :
Automated wafer production
Author_Institution :
IBM Corp., Hopewell Junction, NY, USA
Abstract :
To help meet increased in-house requirements for fabricating LSI logic circuits, quick turn around time is essential for wafer processing and production. This paper will describe a sensor-based computer-controlled line that also affords automated collection and analysis, and contamination control.
Keywords :
Automatic control; Computer aided manufacturing; Control systems; Data analysis; Logic circuits; Logistics; Process control; Production; Routing; Storage automation;
Conference_Titel :
Solid-State Circuits Conference. Digest of Technical Papers. 1980 IEEE International
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/ISSCC.1980.1156072
