DocumentCode
2869679
Title
Automated wafer production
Author
Ning-Gau Wu
Author_Institution
IBM Corp., Hopewell Junction, NY, USA
Volume
XXIII
fYear
1980
fDate
13-15 Feb. 1980
Firstpage
208
Lastpage
209
Abstract
To help meet increased in-house requirements for fabricating LSI logic circuits, quick turn around time is essential for wafer processing and production. This paper will describe a sensor-based computer-controlled line that also affords automated collection and analysis, and contamination control.
Keywords
Automatic control; Computer aided manufacturing; Control systems; Data analysis; Logic circuits; Logistics; Process control; Production; Routing; Storage automation;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference. Digest of Technical Papers. 1980 IEEE International
Conference_Location
San Francisco, CA, USA
Type
conf
DOI
10.1109/ISSCC.1980.1156072
Filename
1156072
Link To Document