Title :
A 0.2°/hr Micro-Gyroscope with Automatic CMOS Mode Matching
Author :
Sharma, Ajit ; Zaman, M. Faisal ; Ayazi, Farrokh
Author_Institution :
Georgia Inst. of Technol., Atlanta, GA
Abstract :
A 3V CMOS IC and interface architecture for automatic mode matching of a high-Q silicon tuning-fork gyroscope is presented. Using this scheme, the frequencies of the drive and sense resonant modes of the gyroscope are automatically matched to yield an effective Q of 36,000 in the sense mode. The angular rate sensor yields a bias drift of 0.27deg/hr and a scale factor of 88mV/deg/s. The IC consumes 6mW and has an area of 2.25 mm2.
Keywords :
CMOS integrated circuits; gyroscopes; microsensors; mode matching; silicon; 3 V; 6 mW; CMOS IC; angular rate sensor; automatic CMOS mode matching; high-Q silicon; interface architecture; microgyroscope; tuning-fork gyroscope; 1f noise; Application specific integrated circuits; Circuit optimization; Counting circuits; Detectors; Gyroscopes; MATLAB; Micromechanical devices; Pulse measurements; Solid state circuits;
Conference_Titel :
Solid-State Circuits Conference, 2007. ISSCC 2007. Digest of Technical Papers. IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
1-4244-0853-9
Electronic_ISBN :
0193-6530
DOI :
10.1109/ISSCC.2007.373456
