• DocumentCode
    2869873
  • Title

    A 0.2°/hr Micro-Gyroscope with Automatic CMOS Mode Matching

  • Author

    Sharma, Ajit ; Zaman, M. Faisal ; Ayazi, Farrokh

  • Author_Institution
    Georgia Inst. of Technol., Atlanta, GA
  • fYear
    2007
  • fDate
    11-15 Feb. 2007
  • Firstpage
    386
  • Lastpage
    610
  • Abstract
    A 3V CMOS IC and interface architecture for automatic mode matching of a high-Q silicon tuning-fork gyroscope is presented. Using this scheme, the frequencies of the drive and sense resonant modes of the gyroscope are automatically matched to yield an effective Q of 36,000 in the sense mode. The angular rate sensor yields a bias drift of 0.27deg/hr and a scale factor of 88mV/deg/s. The IC consumes 6mW and has an area of 2.25 mm2.
  • Keywords
    CMOS integrated circuits; gyroscopes; microsensors; mode matching; silicon; 3 V; 6 mW; CMOS IC; angular rate sensor; automatic CMOS mode matching; high-Q silicon; interface architecture; microgyroscope; tuning-fork gyroscope; 1f noise; Application specific integrated circuits; Circuit optimization; Counting circuits; Detectors; Gyroscopes; MATLAB; Micromechanical devices; Pulse measurements; Solid state circuits;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Circuits Conference, 2007. ISSCC 2007. Digest of Technical Papers. IEEE International
  • Conference_Location
    San Francisco, CA
  • ISSN
    0193-6530
  • Print_ISBN
    1-4244-0853-9
  • Electronic_ISBN
    0193-6530
  • Type

    conf

  • DOI
    10.1109/ISSCC.2007.373456
  • Filename
    4242427
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2869873