DocumentCode :
2869958
Title :
A stacked high capacitor RAM
Author :
Ohta, K. ; Yamada, K. ; Saitoh, M. ; Shiraki, H. ; Nakamura, A. ; Shimizu, K. ; Tarui, Y.
Author_Institution :
VLSI Tech. Res. Association Cooperative Labs., Kawasaki, Japan
Volume :
XXIII
fYear :
1980
fDate :
13-15 Feb. 1980
Firstpage :
66
Lastpage :
67
Keywords :
Capacitance; Capacitors; Electrons; Laboratories; Lithography; MOSFET circuits; Random access memory; Read-write memory; Supercapacitors; Very large scale integration;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Circuits Conference. Digest of Technical Papers. 1980 IEEE International
Conference_Location :
San Francisco, CA, USA
Type :
conf
DOI :
10.1109/ISSCC.1980.1156087
Filename :
1156087
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2869958
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