DocumentCode
2870442
Title
Micro-Type Powder-Sputtered Thin Film Gas Sensors with Long-Term Stability
Author
Lu, Honglang ; Yang, Xueyan ; Wu, Changzhong ; Li, Jianming ; Qiu, Nanyuan
Author_Institution
Sch. of Mech. Eng., Jinan Univ.
fYear
2006
fDate
25-28 June 2006
Firstpage
2111
Lastpage
2115
Abstract
Powder sputtering technique which was developed by means of opposite sputtering has special advantages such as simple doping, easy target preparation, and especially the excellent doping stability in the thin films. Thus more widely investigation on the powder-sputtered metal oxide gas sensing thin films has been executed. Based on these work, the main parameters of the micro-type powder-sputtered thin film gas sensors were designed and the sensors with good long-term stability were developed
Keywords
MIS structures; gas sensors; powder technology; semiconductor doping; semiconductor thin films; sputtering; stability; doping stability; metal oxide gas sensing thin films; micro-type powder-sputtered thin film gas sensors; Gas detectors; Iron; Powders; Semiconductor device doping; Semiconductor thin films; Sputtering; Stability; Substrates; Testing; Thin film sensors; Doping stability; Gas sensors; Powder sputtering; Thin films;
fLanguage
English
Publisher
ieee
Conference_Titel
Mechatronics and Automation, Proceedings of the 2006 IEEE International Conference on
Conference_Location
Luoyang, Henan
Print_ISBN
1-4244-0465-7
Electronic_ISBN
1-4244-0466-5
Type
conf
DOI
10.1109/ICMA.2006.257619
Filename
4026423
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