• DocumentCode
    2870711
  • Title

    A monolithic capacitive pressure sensor with pulse-period output

  • Author

    Sander, C. ; Knutti, J. ; Meindl, J.

  • Author_Institution
    Stanford University, Stanford, CA, USA
  • Volume
    XXIII
  • fYear
    1980
  • fDate
    13-15 Feb. 1980
  • Firstpage
    78
  • Lastpage
    79
  • Abstract
    A batch-fabricated 2.8 × 3.4mm monolithic capacitive pressure sensor, replacing piezoresistive pressure transducers, employing on-chip (less than 10mm2) circuitry, with current drain of 20μA operating at 2.5-20V, will be reported.
  • Keywords
    Biomedical transducers; Biosensors; Capacitance; Capacitive sensors; Capacitors; Hypertension; Monitoring; Piezoresistance; Pulse circuits; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Circuits Conference. Digest of Technical Papers. 1980 IEEE International
  • Conference_Location
    San Francisco, CA, USA
  • Type

    conf

  • DOI
    10.1109/ISSCC.1980.1156130
  • Filename
    1156130
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2870711