Title :
A monolithic capacitive pressure sensor with pulse-period output
Author :
Sander, C. ; Knutti, J. ; Meindl, J.
Author_Institution :
Stanford University, Stanford, CA, USA
Abstract :
A batch-fabricated 2.8 × 3.4mm monolithic capacitive pressure sensor, replacing piezoresistive pressure transducers, employing on-chip (less than 10mm2) circuitry, with current drain of 20μA operating at 2.5-20V, will be reported.
Keywords :
Biomedical transducers; Biosensors; Capacitance; Capacitive sensors; Capacitors; Hypertension; Monitoring; Piezoresistance; Pulse circuits; Silicon;
Conference_Titel :
Solid-State Circuits Conference. Digest of Technical Papers. 1980 IEEE International
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/ISSCC.1980.1156130
