• DocumentCode
    2871008
  • Title

    Invited: Circuit scaling limits for ultra-large-scale integration

  • Author

    Meindl, J. ; Ratnakumar, K. ; Gerzberg, L. ; Saraswat, Krishna

  • Author_Institution
    Stanford University, Stanford, CA, USA
  • Volume
    XXIV
  • fYear
    1981
  • fDate
    18-20 Feb. 1981
  • Firstpage
    36
  • Lastpage
    37
  • Abstract
    This report will define a hierarchy of limits governing ULSI and describe circuit performance to project minimum dimensions for NMOS transistors, polysilicon resistors and interconnections. Possible future levels of ULSI will also be assessed.
  • Keywords
    Electron devices; Integrated circuit technology; MOS devices; MOSFETs; Microelectronics; Silicon; Solid state circuits; Ultra large scale integration; Very large scale integration; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Circuits Conference. Digest of Technical Papers. 1981 IEEE International
  • Conference_Location
    New York, NY, USA
  • Type

    conf

  • DOI
    10.1109/ISSCC.1981.1156150
  • Filename
    1156150
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2871008