DocumentCode
2871080
Title
17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest (IEEE Cat. No.04CH37517)
fYear
2004
fDate
25-29 Jan. 2004
Abstract
Presents the front cover, front matter, and table of contents from the conference proceedings.
Keywords
actuators; electrochemical devices; force sensors; micro-optics; micromechanical devices; packaging; resonators; self-assembly; actuators; biomedical devices; cell handling; chemical devices; force sensors; mechanical sensors; microelectromechanical systems; microoptical devices; nanoelectro mechanical system; optical MEMS; packaging; particle handling; physical sensors; radio frequency devices; resonators; self assembly; stress sensors; wireless communication devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Conference_Location
Maastricht, Netherlands
Print_ISBN
0-7803-8265-X
Type
conf
DOI
10.1109/MEMS.2004.1290492
Filename
1290492
Link To Document