Title :
17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest (IEEE Cat. No.04CH37517)
Abstract :
Presents the front cover, front matter, and table of contents from the conference proceedings.
Keywords :
actuators; electrochemical devices; force sensors; micro-optics; micromechanical devices; packaging; resonators; self-assembly; actuators; biomedical devices; cell handling; chemical devices; force sensors; mechanical sensors; microelectromechanical systems; microoptical devices; nanoelectro mechanical system; optical MEMS; packaging; particle handling; physical sensors; radio frequency devices; resonators; self assembly; stress sensors; wireless communication devices;
Conference_Titel :
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Conference_Location :
Maastricht, Netherlands
Print_ISBN :
0-7803-8265-X
DOI :
10.1109/MEMS.2004.1290492
