Title :
MEMS for a watches
Author :
Noell, W. ; Clerc, P.-A. ; Jeanneret, S. ; Hoogerwerf, A. ; Niedermann, P. ; Perret, A. ; de Rooij, N.F.
Author_Institution :
Inst. of Microtechnol., Univ. of Neuchatel, Neuchatel, Switzerland
Abstract :
In order to make new mechanical watch movements possible as well as adding new functions to wristwatches, MEMS, UV-LIGA, and silicon micromachining have become indispensable technologies in the watch industries. Examples presented here are deep reactive ion etching (DRIE) of silicon gears, SU-8 based UV-LIGA and MEMS based pressure and magnetic sensors. This article provides a brief overview of some recent commercialized technologies in Switzerland.
Keywords :
LIGA; elemental semiconductors; micromachining; micromechanical devices; silicon; sputter etching; watches; MEMS; Si; UV-LIGA; deep reactive ion etching; lithography galvanoformung abformung; magnetic sensors; mechanical watch; microelectromechanical system; pressure sensors; silicon gears; silicon micromachining; watch industries; wristwatches; Micromechanical devices; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Conference_Location :
Maastricht, Netherlands
Print_ISBN :
0-7803-8265-X
DOI :
10.1109/MEMS.2004.1290507
