High-Accuracy Measurements of the Spacing of Diffraction Gratfngs in the Range 0.28/spl mu/m -0.50 /spl mu/m Using Laser Interferometric Diffractometry

Author

Korotkov, V.l. ; Podkin, S.A. ; Vitushkhin, A.L. ; Vitushkin, L.F.

fYear

1996

fDate

8-13 Sept. 1996

Firstpage

188

Lastpage

188

Keywords

Diffraction;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-optics Europe, 1996. CLEO/Europe., Conference on

Conference_Location

Hamburg, Germany

Print_ISBN

0-7803-3169-9

Type

DOI

10.1109/CLEOE.1996.562304

Filename

562304

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