Title :
A 34 µm2 DRAM cell fabricated with a 1 µm single-level polycide FET technology
Author :
Hu Chao ; Dennard, R. ; Mon Tsai ; Wordeman, M. ; Cramer, A.
Author_Institution :
IBM Research Center, Yorktown Heights, NY, USA
Abstract :
Exploratory one-device dynamic RAM arrays, fabricated with N-channel single-level polycide (WSI2) technology with minimum feature size of 1μm, will be discussed.
Keywords :
Circuit noise; Clamps; Delay effects; Electrical resistance measurement; FETs; Noise figure; Noise measurement; Noise reduction; PSNR; Voltage;
Conference_Titel :
Solid-State Circuits Conference. Digest of Technical Papers. 1981 IEEE International
Conference_Location :
New York, NY, USA
DOI :
10.1109/ISSCC.1981.1156177