Title :
Fully integrated optical system for lab-on-a-chip applications
Author :
Balslev, S. ; Bilenberg, B. ; Geschke, O. ; Jorgensen, A.M. ; Kristensen, A. ; Kutter, J.P. ; Mogensen, K.B. ; Snakenborg, D.
Author_Institution :
Mikroelekronick Center, Tech. Univ. Denmark, Lyngby, Denmark
Abstract :
We present a lab-on-a-chip device featuring a microfluidic dye laser, wave-guides, microfluidic components and photo-detectors integrated on the chip. The microsystem is designed for wavelength selective absorption measurements in the visible range on a fluidic sample, which can be prepared/mixed on-chip. The laser structures, wave-guides and micro-fluidic handling system are defined in a single UV-lithography step on a 10 μm thick SU-8 layer on top of the substrate. The SU-8 structures are sealed by a Borofloat glass lid, using polymethylmethacrylate (PMMA) adhesive bonding.
Keywords :
adhesive bonding; dye lasers; integrated optics; microfluidics; photodetectors; ultraviolet lithography; waveguide lasers; 10 micron; Borofloat glass lid; PMMA; UV lithography; integrated optical system; lab-chip device; laser waveguides; microfluidic dye laser; microfluidic handling system; microsystem; photodetectors; polymethylmethacrylate adhesive bonding; ultraviolet lithography; wavelength selective absorption measurements; Glass; Integrated optics; Lab-on-a-chip; Laser modes; Microfluidics; Optical harmonic generation; Optical pumping; Optical waveguides; Pump lasers; Waveguide lasers;
Conference_Titel :
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN :
0-7803-8265-X
DOI :
10.1109/MEMS.2004.1290529
