Fully integrated optical system for lab-on-a-chip applications

Author

Balslev, S. ; Bilenberg, B. ; Geschke, O. ; Jorgensen, A.M. ; Kristensen, A. ; Kutter, J.P. ; Mogensen, K.B. ; Snakenborg, D.

Author_Institution

Mikroelekronick Center, Tech. Univ. Denmark, Lyngby, Denmark

fYear

2004

fDate

2004

Firstpage

89

Lastpage

92

Abstract

We present a lab-on-a-chip device featuring a microfluidic dye laser, wave-guides, microfluidic components and photo-detectors integrated on the chip. The microsystem is designed for wavelength selective absorption measurements in the visible range on a fluidic sample, which can be prepared/mixed on-chip. The laser structures, wave-guides and micro-fluidic handling system are defined in a single UV-lithography step on a 10 μm thick SU-8 layer on top of the substrate. The SU-8 structures are sealed by a Borofloat glass lid, using polymethylmethacrylate (PMMA) adhesive bonding.

Keywords

adhesive bonding; dye lasers; integrated optics; microfluidics; photodetectors; ultraviolet lithography; waveguide lasers; 10 micron; Borofloat glass lid; PMMA; UV lithography; integrated optical system; lab-chip device; laser waveguides; microfluidic dye laser; microfluidic handling system; microsystem; photodetectors; polymethylmethacrylate adhesive bonding; ultraviolet lithography; wavelength selective absorption measurements; Glass; Integrated optics; Lab-on-a-chip; Laser modes; Microfluidics; Optical harmonic generation; Optical pumping; Optical waveguides; Pump lasers; Waveguide lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)

Print_ISBN

0-7803-8265-X

Type

conf

DOI

10.1109/MEMS.2004.1290529

Filename

1290529