A wide range linearly-tunable optical filter using magnetic actuation

Author

Lee, Hyung-Kew ; Kim, Kyu-Sung ; Cho, Il-Joo ; Yoon, Euisik

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Korea Adv. Inst. of Sci. & Technol., South Korea

fYear

2004

fDate

2004

Firstpage

93

Lastpage

96

Abstract

In this paper, we have proposed and demonstrated a widely tunable optical filter using magnetic actuation. We have fabricated and tested three types of spring structures: straight bar, corrugation, and meander types. We have achieved linear displacement over 1 μm due to bi-directional nature of magnetic actuation. From this, we have acquired a wide linear tuning range over 200 nm in wavelength which is the widest ever reported. The fabricated tunable filter consumes a maximum static power less than 25 μW with an external magnetic field of 0.28T.

Keywords

electromagnetic actuators; optical fabrication; optical filters; optical tuning; 0.28 T; 200 nm; linear displacement; linear tuning; magnetic actuation; optical filters; spring structures; tunable filter; Band pass filters; Electrostatic actuators; Magnetic fields; Magnetic separation; Micromechanical devices; Optical filters; Optical tuning; Physics; Reflectivity; Resonance;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)

Print_ISBN

0-7803-8265-X

Type

conf

DOI

10.1109/MEMS.2004.1290530

Filename

1290530