• DocumentCode
    2871648
  • Title

    An NMOS VLSI process for fabrication of a 32b CPU chip

  • Author

    Mikkelson, J. ; Hall, Leonard ; Malhotra, Ahana ; Seccombe, S. ; Wilson, M.

  • Author_Institution
    Hewlett-Packard Company, Fort Collins, CO, USA
  • Volume
    XXIV
  • fYear
    1981
  • fDate
    18-20 Feb. 1981
  • Firstpage
    106
  • Lastpage
    107
  • Abstract
    The VLSI processing system chips with over 600,000 transistors per chip will be discussed, citing the use of optical lithography with a 2.5/\\mu m pitch and double layer metalization.
  • Keywords
    Central Processing Unit; Fabrication; Geometry; Implants; Integrated circuit interconnections; MOS devices; Optical interconnections; Optical refraction; Tungsten; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Circuits Conference. Digest of Technical Papers. 1981 IEEE International
  • Conference_Location
    New York, NY, USA
  • Type

    conf

  • DOI
    10.1109/ISSCC.1981.1156188
  • Filename
    1156188
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2871648