Monolithic integration of microfluidic channels and optical waveguides using a photodefinable epoxy

Author

Ruano, J.M. ; Aguirregabiria, M. ; Tijero, M. ; Arroyo, M. ; Garcia, J. ; Berganzo, J. ; Aramburu, I. ; Blanco, F.J. ; Mayora, K.

Author_Institution

MEMS-MST Dept., Ikerlan S. Koop, Arrasate, Spain

fYear

2004

fDate

2004

Firstpage

121

Lastpage

124

Abstract

This work describes a novel use of a photodefinable epoxy to monolithically integrate low cost optical-microfluidic sensor devices. The chip consists of multimode waveguides, sealed microchannels and optical connectors on a silicon wafer. The process consists of (i) 4 successive photolithographic steps, (ii) a bonding process, (iii) and a final releasing step. The core of the waveguide is made of SU8 in a liquid aliphatic epoxy resin. Despite the dilution, the SU8:aliphatic epoxy is still able to be patterned by photolithography.

Keywords

integrated circuit bonding; microfluidics; microsensors; monolithic integrated circuits; optical couplers; optical polymers; optical sensors; optical waveguides; photolithography; polymers; Si; bonding process; liquid aliphatic epoxy resin; microfluidic channels; monolithic integration; multimode optical waveguides; optical connectors; optical microfluidic sensor devices; photodefinable epoxy; photolithographic; silicon wafer; Connectors; Costs; Integrated optics; Microchannel; Microfluidics; Monolithic integrated circuits; Optical devices; Optical sensors; Optical waveguides; Sensor phenomena and characterization;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)

Print_ISBN

0-7803-8265-X

Type

conf

DOI

10.1109/MEMS.2004.1290537

Filename

1290537