Force dependence of RF MEMS switch contact heating

Contact-type RF MEMS switches have demonstrated low on-state resistance, high off-state impedance, and very large bandwidth; however, their power handling capability is low due to failure caused by contact heating. This paper examines contact heating by measuring V-I curves for contacts in gold switches. Multiphysics modeling allows extraction of contact temperature. Contacts are found to soften and self-anneal at a temperature of about 100°C, corresponding to a contact voltage of about 80 mV. Larger contact force induces a larger decrease in contact resistance during softening, suppressing contact heating. The data provide a better understanding of micro-scale contact physics, leading to design for switches for improved power-handling capability.