Parylene-pyrolyzed carbon for MEMS applications

Author

Liger, M. ; Harder, Theodore A. ; Tai, Yu-Chong ; Konishi, Satoshi

Author_Institution

Dept. of Mech. Eng., Ritsumeikan Univ., Shiga, Japan

fYear

2004

fDate

2004

Firstpage

161

Lastpage

164

Abstract

This paper presents Parylene-pyrolyzed carbon for MEMS applications. Carbons have been used as conductive materials with many promising chemical and thermal properties. This paper focuses on parylene-pyrolyzed carbon to take advantages of its smooth surface deposition and benzene-rich chemical structure. The description of the parylene-pyrolyzed carbon has been tried through evaluations of electrical and mechanical properties in terms of MEMS applications as well as general features. Young´s modulus and the resistivity of parylene-pyrolyzed carbon (800°C pyrolysis) becomes 70GPa and 0.1 Ωcm, respectively. The relationship between these properties and density will be also discussed.

Keywords

Young´s modulus; chemical structure; density; electrical resistivity; micromechanical devices; polymer films; pyrolysis; 0.1 ohmcm; 800 degC; MEMS; Young modulus; chemical properties; chemical structure; conductive materials; electrical properties; mechanical properties; microelectromechanical systems; parylene pyrolyzed carbon; surface deposition; thermal properties; thin films; Carbon dioxide; Chemical technology; Chemical vapor deposition; Conducting materials; Mechanical factors; Micromechanical devices; Organic materials; Substrates; Surface topography; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)

Print_ISBN

0-7803-8265-X

Type

conf

DOI

10.1109/MEMS.2004.1290547

Filename

1290547