DocumentCode :
2871875
Title :
A micro differential thermal analysis (μDTA) system
Author :
Ruther, Patrick ; Herrscher, Markus ; Paul, Oliver
Author_Institution :
Inst. for Microsyst. Technol., Freiburg Univ., Germany
fYear :
2004
fDate :
2004
Firstpage :
165
Lastpage :
168
Abstract :
This paper reports on a microsystem for differential thermal analysis (DTA) useful for the thermal characterization of phase transitions in small samples. The system consists of micromachined hotplates made of silicon oxide and nitride with integrated heaters and thermistors. The symmetric layout of the hotplate guarantees a homogeneous temperature distribution across the heated part of the membrane with deviations |ΔT|≤2 K at temperatures up to 560 K. In experiment and modelling different heating modes, such as rectangular or triangular pulses or sinusoidal thermal excitation at frequencies f up to 10 Hz, are applied. The principle of differential thermal analysis (DTA) is demonstrated through the extraction of melting points Tm of various materials. In case of benzophenone with an estimated sample mass of 50 μg, Tm is determined with an accuracy better than 2 K with respect to the literature value.
Keywords :
differential thermal analysis; melting point; micromechanical devices; phase transformations; silicon compounds; temperature distribution; thermistors; DTA; SiN; SiO2; benzophenone; heaters; heating modes; homogeneous temperature distribution; hotplate layout; melting points; micro differential thermal analysis; micromachined hotplates; microsystem; phase transitions; rectangular pulses; silicon nitride; silicon oxide; sinusoidal thermal excitation; thermal characterization; thermistors; triangular pulses; Anisotropic magnetoresistance; Biomembranes; Cogeneration; Passivation; Resistors; Silicon compounds; Space heating; Temperature distribution; Thermal conductivity; Thermistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN :
0-7803-8265-X
Type :
conf
DOI :
10.1109/MEMS.2004.1290548
Filename :
1290548
Link To Document :
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