Title :
An Online Automatic Method for Correction of Piezoelectric Scanner
Author :
Li, Yingzi ; Qian, Jianqiang ; Liu, Wenliang ; Li, Yuan ; Hua, Baocheng ; Yang, Yong
Author_Institution :
Dept. of Phys., Beihang Univ., Beijing, China
Abstract :
A novel online auto-correction method is proposed in this paper, according to the nonlinearity and hysteresis of atomic force microscope (AFM) piezoelectric ceramics scanner. In this method, an automatic positioning algorithm is invoked to get the same characteristic points from the forward and backward scanning line; these points are used to calculate the distortion factors to realized image correction. Mathematical derivation of the correction principle is given, and automatic positioning algorithm based on successive template comparison is introduced. Finally situations may cause invalidation of the method are discussed and solutions are given. Practice proves that the method is effective and can be applied in AFM automation.
Keywords :
atomic force microscopy; piezoceramics; piezoelectric devices; atomic force microscope; automatic positioning algorithm; distortion factor; image correction; online autocorrection method; piezoelectric ceramic scanner; Atomic force microscopy; Automation; Ceramics; Creep; Feedback; Hardware; Hysteresis; Instruments; Optical distortion; Physics;
Conference_Titel :
Computational Intelligence and Software Engineering, 2009. CiSE 2009. International Conference on
Conference_Location :
Wuhan
Print_ISBN :
978-1-4244-4507-3
Electronic_ISBN :
978-1-4244-4507-3
DOI :
10.1109/CISE.2009.5366729