DocumentCode
2872424
Title
Tentative of Realization of New Silicon-Integrated Interferometric Microvibration Sensor with Piezoelectric Amplitude Modulation
fYear
1996
fDate
8-13 Sept. 1996
Firstpage
191
Lastpage
191
Keywords
Acoustic beams; Acoustic waves; Electromagnetic waveguides; Frequency; Optical interferometry; Optical modulation; Optical sensors; Optical waveguides; Silicon; Vibration measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-optics Europe, 1996. CLEO/Europe., Conference on
Conference_Location
Hamburg, Germany
Print_ISBN
0-7803-3169-9
Type
conf
DOI
10.1109/CLEOE.1996.562311
Filename
562311
Link To Document