A MEMS Disk Resonator-Based Oscillator

Author

El Khouly, Moustafa M. ; Nada, Yasseen ; Hegazi, Emad ; Ragai, Hani F. ; Ghannam, Moustafa Y.

Author_Institution

Dept. of Phys., American Univ. in Cairo, Cairo

fYear

2006

fDate

16-19 Dec. 2006

Firstpage

75

Lastpage

78

Abstract

A fully integrated MEMS based oscillator using a MEMS disk resonator is presented. Parameter extraction for a circuit model of the disk resonator using ANSYS is carried out at 60.6 MHz. A PIERCE oscillator using the disk resonator is designed. The circuit simulations are presented. The different specs of the oscillator like frequency, phase noise and frequency stability are investigated. The effect of the presence of the disk resonator on the performance of the oscillator is demonstrated.

Keywords

VHF oscillators; frequency stability; micromechanical resonators; phase noise; ANSYS; MEMS based oscillator; MEMS disk resonator; PIERCE oscillator; circuit simulations; frequency 60.6 MHz; frequency stability; fully integrated oscillator design; parameter extraction; phase noise; Capacitance; Circuits; Electrodes; Frequency; Micromechanical devices; Oscillators; Parameter extraction; Phase noise; Transducers; Voltage; Disk Resonator; Frequency Stability; MEMS; Phase Noise; Pierce Oscillator;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronics, 2006. ICM '06. International Conference on

Conference_Location

Dhahran

Print_ISBN

1-4244-0764-8

Electronic_ISBN

1-4244-0765-6

Type

conf

DOI

10.1109/ICM.2006.373270

Filename

4243651