Title :
Spinel-Isolated high-voltage ICs
Author :
Ihara, M. ; Arimoto, Yasushi ; Jifuku, M. ; Yamaoka, Tomoya ; Kurokawa, Kaneyuki
Author_Institution :
Fujitsu Laboratories, Ltd., Kawasaki, Japan
Abstract :
The quality of silicon on spinel epitaxially grown on spinel and the characteristics of 250V bipolar ICs and MOS devices fabricated in the epitaxial silicon will be discussed.
Keywords :
Bipolar transistors; Driver circuits; Drives; Etching; Laboratories; MOSFETs; Plasma displays; Ring oscillators; Silicon; Voltage;
Conference_Titel :
Solid-State Circuits Conference. Digest of Technical Papers. 1981 IEEE International
Conference_Location :
New York, NY, USA
DOI :
10.1109/ISSCC.1981.1156236
