Title :
Implantable resonant mass sensor for liquid biochemical sensing
Author :
Zhang, Hao ; Marma, Mong S. ; Kim, Eun Sok ; McKenna, Charles E. ; Thompson, Mark E.
Author_Institution :
Dept. of Electr. Eng.-Electrophys., Univ. of Southern California, Los Angeles, CA, USA
Abstract :
This paper describes an implantable, resonant mass sensor (built on a micromachined probe with a piezoelectric thin film) for liquid mass sensing. The sensor is basically a film-bulk-acoustic resonator (FBAR) with a piezoelectric ZnO film and two Al layers sitting on a silicon nitride (SiN) diaphragm, which forms the tip portion of an implantable silicon probe for recording neuronal activities in a living biological tissue.
Keywords :
acoustic resonators; aluminium; biochemistry; biological tissues; biosensors; chemical sensors; micromachining; piezoelectric thin films; zinc compounds; Al-SiN; ZnO; film bulk acoustic resonator; implantable resonant mass sensor; implantable silicon probe; liquid biochemical sensing; liquid mass sensing; living biological tissue; micromachined probe; neuronal activity recording; piezoelectric thin film; silicon nitride diaphragm; Biosensors; Film bulk acoustic resonators; Piezoelectric films; Probes; Resonance; Semiconductor films; Sensor phenomena and characterization; Silicon; Thin film sensors; Zinc oxide;
Conference_Titel :
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN :
0-7803-8265-X
DOI :
10.1109/MEMS.2004.1290593
