DocumentCode :
2872739
Title :
A New Lateral Shearing Interferometer for Testing Silicon Microlenses
Author :
Schreiber, Hendrik ; Schwider, J.
fYear :
1996
fDate :
8-13 Sept. 1996
Firstpage :
192
Lastpage :
192
Keywords :
Gratings; Lenses; Microoptics; Optical interferometry; Optical sensors; Optimized production technology; Phase shifting interferometry; Shearing; Silicon; Testing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-optics Europe, 1996. CLEO/Europe., Conference on
Conference_Location :
Hamburg, Germany
Print_ISBN :
0-7803-3169-9
Type :
conf
DOI :
10.1109/CLEOE.1996.562313
Filename :
562313
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2872739
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