DocumentCode
2872739
Title
A New Lateral Shearing Interferometer for Testing Silicon Microlenses
Author
Schreiber, Hendrik ; Schwider, J.
fYear
1996
fDate
8-13 Sept. 1996
Firstpage
192
Lastpage
192
Keywords
Gratings; Lenses; Microoptics; Optical interferometry; Optical sensors; Optimized production technology; Phase shifting interferometry; Shearing; Silicon; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-optics Europe, 1996. CLEO/Europe., Conference on
Conference_Location
Hamburg, Germany
Print_ISBN
0-7803-3169-9
Type
conf
DOI
10.1109/CLEOE.1996.562313
Filename
562313
Link To Document