DocumentCode
2872773
Title
Emerging micro and nanomanufacturing processes for electrical and electronic engineering applications
Author
Jackson, M.J. ; Robinson, G.M.
Author_Institution
Purdue Univ., West Lafayette, IN
fYear
2005
fDate
26-26 Oct. 2005
Firstpage
466
Lastpage
478
Abstract
There is a plethora of micro and nanofabrication processes that have been developed over the past twenty years for use in the electrical and electronic sectors. Processes such as optical lithography, X-ray lithography, LiGA, selective laser sintering, laser micromachining, wet and dry plasma etching, casting, molding etc are already well established. However, newly emerging processes such as laser nanofabrication, atomic force microscopy, dip pen nanolithography, diamond nanogrinding etc, have yet to realize their potential. The future of micro and nanomanufacturing lies in the ability to convert micro and nanofabrication techniques into mass production manufacturing processes where small-scale products can be economically manufactured in a short period of time. This may be achieved by combining micro and nanoscale processes, or by combining ´top down´ and ´bottom up´ manufacturing techniques. The development of so-called hybrid manufacturing processes is set to take center stage in the future development of micro and nanomanufacturing processes. This paper will focus on current developments in the field of micro and nanomanufacturing for electrical and electronic manufacturing industries
Keywords
electrical products industry; electronics industry; manufacturing processes; mass production; nanotechnology; electrical-electronic manufacturing industry; hybrid manufacturing process; mass production; micro-nanomanufacturing process; Atom optics; Atomic force microscopy; Laser sintering; Manufacturing processes; Micromachining; Nanofabrication; Plasma applications; Plasma x-ray sources; X-ray lasers; X-ray lithography;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Insulation Conference and Electrical Manufacturing Expo, 2005. Proceedings
Conference_Location
Indianapolis, IN
Print_ISBN
0-7803-9145-4
Type
conf
DOI
10.1109/EEIC.2005.1566335
Filename
1566335
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