Title :
Micro SMA actuator and motion control
Author :
Kuribayashi, Katsutoshi
Author_Institution :
Fac. of Eng., Yamaguchi Univ., Ube, Japan
Abstract :
To control a micromechatronic system, microsensors and microactuators are necessary. So far a lot of sensors made by using Si micromachining technology have been reported. On the other hand, only a few microactuators have been developed. Among these, micro SMA actuators have attracted strong attention because of their strong force, high power, faster response for their micro size and size reducibility by micromachining technology. In this plenary talk, the fabrication methods of micro SMA actuators and motion control using a micro SMA actuator are reviewed
Keywords :
heat treatment; intelligent actuators; microactuators; micromachining; motion control; nickel alloys; shape memory effects; sputter deposition; step response; titanium alloys; TiNi; fabrication methods; heat treatment; linearised mathematical model; micromachining; micromechatronic system; motion control; reversible shape memory effect; shape memory alloy microactuators; size reducibility; sputter deposition; step response; tensile dynamic properties; Actuators; Copper; Fabrication; Heat treatment; Microactuators; Motion control; Shape memory alloys; Sputtering; Substrates; Transistors;
Conference_Titel :
Micromechatronics and Human Science, 2000. MHS 2000. Proceedings of 2000 International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-6498-8
DOI :
10.1109/MHS.2000.903279
