DocumentCode

2872875

Title

High resolution electron beam nanofabrication

Author

Craighead, H.G.

Author_Institution

Cornell University

fYear

1994

fDate

1994

Keywords

Bonding; Chemicals; Electron beams; Nanofabrication; Nanolithography; Physics; Probes; Resists; Robustness; Self-assembly;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International

Type

conf

DOI

10.1109/EDMS.1994.771099

Filename

771099