A thermally actuated three-probe nanomanipulator for efficient handling of individual nanostructures

Author

Xuefeng Wang ; Vincent, Loren ; Yu, Minfeng ; Huang, Yonggang ; Liu, Chung

Author_Institution

Illinois Univ., Urbana, IL, USA

fYear

2004

fDate

2004

Firstpage

442

Lastpage

445

Abstract

We report recent development of a three-probe micromachined nanomanipulator for manipulation and in-situ characterization of nanomaterials in scanning electron microscope (SEM). The nanomanipulator consists of three independent probes having thermal bimetallic actuators and nanoscopic end-effectors. Nanoscale end-effectors with sub-100-nm spacing are created using focused ion beam (FIB) milling to directly interface with nanoscopic objects (e.g., nanotubes, nanowires). Handling of individual carbon nanotubes (CNTs) was successfully realized with the nanomanipulator in an SEM.

Keywords

carbon nanotubes; end effectors; focused ion beam technology; microactuators; micromachining; micromanipulators; nanotechnology; scanning electron microscopy; C; CNT; FIB milling; SEM; carbon nanotubes; focused ion beam milling; nanomanipulator; nanoscopic end effectors; nanostructure handling; scanning electron microscopy; thermal bimetallic actuators; Actuators; Atomic force microscopy; Electrodes; Nanobioscience; Nanomaterials; Nanostructures; Nanowires; Probes; Scanning electron microscopy; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)

Print_ISBN

0-7803-8265-X

Type

conf

DOI

10.1109/MEMS.2004.1290617

Filename

1290617