DocumentCode :
2873444
Title :
Visible photoluminescence wiht multiple peaks from the porous boron 5δ-doped Si superlattice
Author :
Chang, T.C. ; Hsu, M.Y. ; Chang, C.Y. ; Lee, C.P. ; Jung, T.G. ; Hunag, G.W. ; Tsai, W.C. ; Chen, L.P.
Author_Institution :
National Chiao Tung University
fYear :
1994
fDate :
1994
Firstpage :
38385
Lastpage :
39480
Keywords :
Boron; Etching; Interference; Luminescence; Photoluminescence; Photonic crystals; Scanning electron microscopy; Silicon; Superlattices; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
Type :
conf
DOI :
10.1109/EDMS.1994.771131
Filename :
771131
Link To Document :
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