Title :
Studies of behaviors and 2-D imaging of hydrogen on solid surfaces
Author_Institution :
Graduate Sch. of Eng., Toyota Technol. Inst., Nagoya, Japan
Abstract :
In the field of semiconductor, fuel cell and metallurgical industries, studies of behaviors of hydrogen in material are important issue. However, detection of hydrogen in solid or on surfaces was hardly performed because no commercially available instrument. Recently we have developed imaging system of hydrogen on solid surfaces using an electron-stimulated desorption (ESD) microscopy. The ESD measures hydrogen and oxygen ions stimulated electronically on the solid surface and detects using time-of-flight (TOF) techniques. When a microfocused electron gun is used in scanning-mode with pulsed electron beam, it works as a scanning electron-stimulated desorption ion microscopy (SESDIM).
Keywords :
electron guns; electron stimulated desorption; hydrogen ions; ion microscopy; scanning electron microscopy; time of flight spectra; 2D imaging; hydrogen behavior; microfocused electron gun; pulsed electron beam; scanning electron-stimulated desorption ion microscopy; solid surfaces; time-of-flight techniques; Electron beams; Electron microscopy; Electrostatic discharge; Fuel cells; Hydrogen; Inorganic materials; Instruments; Metals industry; Semiconductor materials; Solids;
Conference_Titel :
Future of Electron Devices, 2004. International Meeting for
Print_ISBN :
0-7803-8423-7
Electronic_ISBN :
0-7803-8424-5
DOI :
10.1109/IMFEDK.2004.1566391