DocumentCode
2873834
Title
Uncooled all-parylene bolometer
Author
Liger, Mathieu ; Konishi, Saioshi ; Tai, Yu-Chong
Author_Institution
California Inst. of Technol., Pasadena, CA, USA
fYear
2004
fDate
2004
Firstpage
593
Lastpage
596
Abstract
This paper presents an uncooled, room-temperature, all-parylene bolometer. The device is made of two layers of pyrolyzed (or "carbonized") parylene and a metal layer for interconnections. We demonstrated that high responsivity can be achieved by tailoring the electrical conductivity and the temperature coefficient of resistance (TCR) using different pyrolysis conditions for each parylene layer.
Keywords
bolometers; electric resistance; electrical conductivity; polymer films; pyrolysis; electrical conductivity; pyrolysis; temperature coefficient of resistance; uncooled all-parylene bolometer; Amorphous silicon; Bolometers; Conducting materials; Electric resistance; Electrical resistance measurement; Leg; Temperature dependence; Temperature sensors; Thermal conductivity; Thermal resistance;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN
0-7803-8265-X
Type
conf
DOI
10.1109/MEMS.2004.1290654
Filename
1290654
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