DocumentCode
2873872
Title
Insb photo-mosfet fabricated by photo-enhanced chemical vapor deposition
Author
Liu, Biing-Der ; Lee, Si-Chen ; Sun, Tai-Ping ; Yang, Sheng-Jenn
Author_Institution
National Taiwan University
fYear
1994
fDate
1994
Firstpage
42830
Lastpage
43926
Keywords
Bonding; Chemical vapor deposition; Chromium; Equivalent circuits; Fabrication; Gold; Infrared detectors; MOSFET circuits; Switches; Threshold voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
Type
conf
DOI
10.1109/EDMS.1994.771203
Filename
771203
Link To Document