DocumentCode

2873976

Title

Memory cell technology for high performance SRAMs

Author

Ikeda, Shuji

Author_Institution

Hitachi, Ltd.

fYear

1994

fDate

1994

Firstpage

37012

Lastpage

38108

Keywords

Fabrication; Low voltage; Process design; Silicon; Stability; Stress; Substrates; Temperature measurement; Testing; Thin film transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International

Type

conf

DOI

10.1109/EDMS.1994.771211

Filename

771211