Title :
Micro-hotplate for thin film gas sensor: fabrication using cmos technology
Author :
Fung, Samuel K H ; Chan, Philip C.H. ; Sin, Johnny K O ; Cheung, Peter W.
Author_Institution :
Hong Kong University of Science and Technology
Keywords :
Aluminum; CMOS technology; Etching; Fabrication; Gas detectors; Silicon; Temperature sensors; Thermal conductivity; Thermal resistance; Thin film sensors;
Conference_Titel :
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
DOI :
10.1109/EDMS.1994.771219
