Title :
The study of silicon pressure sensors fabrication
Author :
Chang, Chung-Cheng ; Liu, Chi-Tsai ; Hsich, Mei-Kuan
Author_Institution :
National Taiwan Ocean University
Keywords :
Bridge circuits; Etching; Fabrication; Ocean temperature; Piezoresistance; Resistors; Sensor phenomena and characterization; Silicon; Temperature sensors; Voltage;
Conference_Titel :
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
DOI :
10.1109/EDMS.1994.771220
