Title :
Laser ablated pyroelectric thin films for room temperature IR sensors
Author :
Wang, Hui-Ling ; Hu, Chen-Ti ; I-Nan Lin ; Huang, Chin-Ming ; Tsai, C.H. ; Lin, I-Nan ; Cheng, Hsin-Fung
Author_Institution :
National Tsing Hua University
Keywords :
Capacitance-voltage characteristics; Dielectric substrates; Ferroelectric films; Infrared sensors; Optical pulses; Pulsed laser deposition; Pyroelectricity; Sputtering; Temperature sensors; Thin film sensors;
Conference_Titel :
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
DOI :
10.1109/EDMS.1994.771222
