Title :
Fatigue behavior of SrBi2Ta2O9 capacitors with different top electrodes
Author :
Tamai, Shin-Ichi ; Kobayashi, Hiroyuki ; Maeda, Yoshihito ; Tatsumi, Naoyuki ; Nozawa, Hiroshi
Author_Institution :
Dept. of Energy Sci. & Technol., Kyoto Univ., Japan
Abstract :
We investigated effects of top electrodes on fatigue behavior of SrBi2Ta2O9 (SBT) capacitors after bipolar switching. The SBT films of 200 nm in thickness were formed on Pt bottom electrodes by a metal organic decomposition (MOD) process. Some top electrodes (Pt, Ag, Au, Al, and Cu) were deposited on the SBT films by conventional vacuum evaporation. The fatigue under application of bipolar pulses with 500 kHz and the amplitude of 250 kV/cm was measured with an RT6000S test system (Radiant Technologies).
Keywords :
aluminium; bismuth compounds; copper; fatigue; ferroelectric capacitors; ferroelectric materials; gold; platinum; silver; strontium compounds; tantalum compounds; vacancies (crystal); vacuum deposition; 200 nm; 500 kHz; Ag; Al; Au; Cu; Pt; SBT films; SrBi2Ta2O9; bipolar switching; bottom electrodes; capacitors; fatigue behavior; films deposition; metal organic decomposition process; top electrodes; vacuum evaporation; Capacitors; Electrodes; Fatigue; Gold; Performance evaluation; Testing;
Conference_Titel :
Future of Electron Devices, 2004. International Meeting for
Print_ISBN :
0-7803-8423-7
Electronic_ISBN :
0-7803-8424-5
DOI :
10.1109/IMFEDK.2004.1566421
