DocumentCode :
2874434
Title :
0.2 μm AlGaAs/InGaAs pseudomorphic HEMT fabricated by optical lithography
Author :
Chen, Chu Dong ; Chen, Shiow Jen ; Chen, Yuan Tzay ; Chuang, Tien Min ; Huang, Ming Fon ; Juang, Feng Yuh ; Chang, Chung Chi ; Chan, Yi Jen ; Chyi, Jen Inn
Author_Institution :
National Central University
fYear :
1994
fDate :
1994
Firstpage :
43286
Lastpage :
44382
Keywords :
Cutoff frequency; Etching; Gallium arsenide; HEMTs; Indium gallium arsenide; Lithography; MODFETs; Optical noise; PHEMTs; Resists;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
Type :
conf
DOI :
10.1109/EDMS.1994.771265
Filename :
771265
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2874434
